Handbook of silicon based MEMS materials and technologies /
Handbook of silicon based MEMS materials and technologies / [edited by] Markku Tilli, Teruaki Motooka, Veli-Matti Airaksinen, Sami Franssila, Mervi Paulasto-Kröckel, Veikko Lindroos. - 2nd edition. - xxxvii, 787 pages : illustrations ; 29 cm. - Micro & nano technologies series . - Micro & nano technologies. .
Includes bibliographical references and index.
0323299652 (hbk.) 9780323299657 (hbk.)
2015937707
Microelectromechanical systems.
Microelectromechanical systems--Materials.
Silicon--Electric properties.
Microelectromechanical systems
Microelectromechanical systems--Materials
Silicon--Electric properties
TK7875 / .H36 2015
621.38152
Includes bibliographical references and index.
0323299652 (hbk.) 9780323299657 (hbk.)
2015937707
Microelectromechanical systems.
Microelectromechanical systems--Materials.
Silicon--Electric properties.
Microelectromechanical systems
Microelectromechanical systems--Materials
Silicon--Electric properties
TK7875 / .H36 2015
621.38152