MARC details
| 000 -LEADER |
|---|
| fixed length control field |
02002cam a22004335i 4500 |
| 001 - CONTROL NUMBER |
|---|
| control field |
41253 |
| 003 - CONTROL NUMBER IDENTIFIER |
|---|
| control field |
0000000000 |
| 005 - DATE AND TIME OF LATEST TRANSACTION |
|---|
| control field |
20240411193023.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
|---|
| fixed length control field |
150401s2015 ne s 000 0 eng d |
| 010 ## - LIBRARY OF CONGRESS CONTROL NUMBER |
|---|
| LC control number |
2015937707 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
0323299652 (hbk.) |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
9780323299657 (hbk.) |
| 035 ## - SYSTEM CONTROL NUMBER |
|---|
| System control number |
(OCoLC)ocn921939919 |
| 035 ## - SYSTEM CONTROL NUMBER |
|---|
| System control number |
18551272 |
| 040 ## - CATALOGING SOURCE |
|---|
| Original cataloging agency |
YDXCP |
| Language of cataloging |
eng |
| Transcribing agency |
YDXCP |
| Description conventions |
rda |
| Modifying agency |
MYG |
| -- |
OCLCQ |
| -- |
OCLCF |
| -- |
DEBSZ |
| -- |
DLC |
| 042 ## - AUTHENTICATION CODE |
|---|
| Authentication code |
lccopycat |
| 050 00 - LIBRARY OF CONGRESS CALL NUMBER |
|---|
| Classification number |
TK7875 |
| Item number |
.H36 2015 |
| 082 04 - DEWEY DECIMAL CLASSIFICATION NUMBER |
|---|
| Classification number |
621.38152 |
| 245 00 - TITLE STATEMENT |
|---|
| Title |
Handbook of silicon based MEMS materials and technologies / |
| Statement of responsibility, etc. |
[edited by] Markku Tilli, Teruaki Motooka, Veli-Matti Airaksinen, Sami Franssila, Mervi Paulasto-Kröckel, Veikko Lindroos. |
| 250 ## - EDITION STATEMENT |
|---|
| Edition statement |
2nd edition. |
| 264 #1 - PRODUCTION, PUBLICATION, DISTRIBUTION, MANUFACTURE, AND COPYRIGHT NOTICE |
|---|
| Place of production, publication, distribution, manufacture |
Norwich : |
| Name of producer, publisher, distributor, manufacturer |
William Anderew is an imprint of Elsevier, |
| Date of production, publication, distribution, manufacture, or copyright notice |
2015. |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
xxxvii, 787 pages : |
| Other physical details |
illustrations ; |
| Dimensions |
29 cm. |
| 336 ## - CONTENT TYPE |
|---|
| Content type term |
text |
| Source |
rdacontent |
| 337 ## - MEDIA TYPE |
|---|
| Media type term |
computer |
| Source |
rdamedia |
| 338 ## - CARRIER TYPE |
|---|
| Carrier type term |
online resource |
| Source |
rdacarrier |
| 490 1# - SERIES STATEMENT |
|---|
| Series statement |
Micro & nano technologies series |
| 504 ## - BIBLIOGRAPHY, ETC. NOTE |
|---|
| Bibliography, etc. note |
Includes bibliographical references and index. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Microelectromechanical systems. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Microelectromechanical systems |
| General subdivision |
Materials. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Silicon |
| General subdivision |
Electric properties. |
| 650 #7 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Microelectromechanical systems |
| Source of heading or term |
fast |
| Authority record control number or standard number |
(OCoLC)fst01019745. |
| 650 #7 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Microelectromechanical systems |
| General subdivision |
Materials |
| Source of heading or term |
fast |
| Authority record control number or standard number |
(OCoLC)fst01019748. |
| 650 #7 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Silicon |
| General subdivision |
Electric properties |
| Source of heading or term |
fast |
| Authority record control number or standard number |
(OCoLC)fst01118637. |
| 700 1# - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Markku, Tilli, |
| Relator term |
editor. |
| 776 08 - ADDITIONAL PHYSICAL FORM ENTRY |
|---|
| Relationship information |
Online version: |
| Title |
Handbook of silicon based MEMS materials and technologies. |
| Edition |
Second edition. |
| Place, publisher, and date of publication |
London, UK : William Andrew is an imprint of Elsevier, 2015 |
| International Standard Book Number |
9780323312233 |
| Record control number |
(OCoLC)920564477 |
| 830 #0 - SERIES ADDED ENTRY--UNIFORM TITLE |
|---|
| Uniform title |
Micro & nano technologies. |
| 856 ## - ELECTRONIC LOCATION AND ACCESS |
|---|
| Uniform Resource Identifier |
<a href="https://drive.google.com/file/d/1gooLpRQ9QG2TIHhtQHo12Cn6Tm8VtNYr/view?usp=sharing">https://drive.google.com/file/d/1gooLpRQ9QG2TIHhtQHo12Cn6Tm8VtNYr/view?usp=sharing</a> |
