Handbook of silicon based MEMS materials and technologies /
[edited by] Markku Tilli, Teruaki Motooka, Veli-Matti Airaksinen, Sami Franssila, Mervi Paulasto-Kröckel, Veikko Lindroos.
- 2nd edition.
- xxxvii, 787 pages : illustrations ; 29 cm.
- Micro & nano technologies series .
- Micro & nano technologies. .
Includes bibliographical references and index.
0323299652 (hbk.) 9780323299657 (hbk.)
2015937707
Microelectromechanical systems.
Microelectromechanical systems--Materials.
Silicon--Electric properties.
Microelectromechanical systems
Microelectromechanical systems--Materials
Silicon--Electric properties
TK7875 / .H36 2015
621.38152