TY  - BOOK
AU  - Markku,Tilli
TI  - Handbook of silicon based MEMS materials and technologies
T2  - Micro & nano technologies series
SN  - 0323299652 (hbk.)
AV  - TK7875 .H36 2015
U1  - 621.38152 
PY  - 2015///
CY  - Norwich
PB  - William Anderew is an imprint of Elsevier
KW  - Microelectromechanical systems
KW  - Materials
KW  - Silicon
KW  - Electric properties
KW  - fast
N1  - Includes bibliographical references and index
UR  - https://drive.google.com/file/d/1gooLpRQ9QG2TIHhtQHo12Cn6Tm8VtNYr/view?usp=sharing
ER  -