Handbook of silicon based MEMS materials and technologies / [edited by] Markku Tilli, Teruaki Motooka, Veli-Matti Airaksinen, Sami Franssila, Mervi Paulasto-Kröckel, Veikko Lindroos.
Material type: TextSeries: Micro & nano technologiesPublisher: Norwich : William Anderew is an imprint of Elsevier, 2015Edition: 2nd editionDescription: xxxvii, 787 pages : illustrations ; 29 cmContent type:- text
- computer
- online resource
- 0323299652 (hbk.)
- 9780323299657 (hbk.)
- 621.38152
- TK7875 .H36 2015
Item type | Current library | Call number | Status | Date due | Barcode | |
---|---|---|---|---|---|---|
E-Resources | Main Library E-Resources | 621.38152 H236 (Browse shelf(Opens below)) | Available | E002819 |
Includes bibliographical references and index.
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