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| 010 | _a 2015937707 | ||
| 020 | _a0323299652 (hbk.) | ||
| 020 | _a9780323299657 (hbk.) | ||
| 035 | _a(OCoLC)ocn921939919 | ||
| 035 | _a18551272 | ||
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_aYDXCP _beng _cYDXCP _erda _dMYG _dOCLCQ _dOCLCF _dDEBSZ _dDLC |
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| 042 | _alccopycat | ||
| 050 | 0 | 0 |
_aTK7875 _b.H36 2015 |
| 082 | 0 | 4 | _a621.38152 |
| 245 | 0 | 0 |
_aHandbook of silicon based MEMS materials and technologies / _c[edited by] Markku Tilli, Teruaki Motooka, Veli-Matti Airaksinen, Sami Franssila, Mervi Paulasto-Kröckel, Veikko Lindroos. |
| 250 | _a2nd edition. | ||
| 264 | 1 |
_aNorwich : _bWilliam Anderew is an imprint of Elsevier, _c2015. |
|
| 300 |
_axxxvii, 787 pages : _billustrations ; _c29 cm. |
||
| 336 |
_atext _2rdacontent |
||
| 337 |
_acomputer _2rdamedia |
||
| 338 |
_aonline resource _2rdacarrier |
||
| 490 | 1 | _aMicro & nano technologies series | |
| 504 | _aIncludes bibliographical references and index. | ||
| 650 | 0 | _aMicroelectromechanical systems. | |
| 650 | 0 |
_aMicroelectromechanical systems _xMaterials. |
|
| 650 | 0 |
_aSilicon _xElectric properties. |
|
| 650 | 7 |
_aMicroelectromechanical systems _2fast _0(OCoLC)fst01019745. |
|
| 650 | 7 |
_aMicroelectromechanical systems _xMaterials _2fast _0(OCoLC)fst01019748. |
|
| 650 | 7 |
_aSilicon _xElectric properties _2fast _0(OCoLC)fst01118637. |
|
| 700 | 1 |
_aMarkku, Tilli, _eeditor. |
|
| 776 | 0 | 8 |
_iOnline version: _tHandbook of silicon based MEMS materials and technologies. _bSecond edition. _dLondon, UK : William Andrew is an imprint of Elsevier, 2015 _z9780323312233 _w(OCoLC)920564477 |
| 830 | 0 | _aMicro & nano technologies. | |
| 856 | _uhttps://drive.google.com/file/d/1gooLpRQ9QG2TIHhtQHo12Cn6Tm8VtNYr/view?usp=sharing | ||
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