Handbook of silicon based MEMS materials and technologies / [edited by] Markku Tilli, Teruaki Motooka, Veli-Matti Airaksinen, Sami Franssila, Mervi Paulasto-Kröckel, Veikko Lindroos.

Contributor(s):

Material type: Text

TextSeries: Micro & nano technologiesPublisher: Norwich : William Anderew is an imprint of Elsevier, 2015Edition: 2nd editionDescription: xxxvii, 787 pages : illustrations ; 29 cmContent type:

Media type:

Carrier type:

ISBN:

Subject(s):

Additional physical formats: Online version:: Handbook of silicon based MEMS materials and technologies.DDC classification:

LOC classification:

Online resources:

Tags from this library: No tags from this library for this title. Log in to add tags.

Holdings
Item type	Current library	Call number	Status	Date due	Barcode
E-Resources	Main Library E-Resources	621.38152 H236 (Browse shelf(Opens below))	Available		E002819

Includes bibliographical references and index.

There are no comments on this title.

to post a comment.